High flow bulk specialty gas supply, ultra high purity gas sticks for semiconductor, LED, photovoltaic and MEMS equipment hookup. Ultra high purity filtration in valve manifold boxes, gas cabinets, tool isolation gas boxes, on-board gas delivery boxes or any process requiring ultra high purity particle removal.
For high flow gas filtration efficiency, strength, and reliability, GasShield Penta® all-metal gas filters are ideal for ultra high purity gas delivery applications. They are offered in all welded 316L stainless steel housings with Penta® Nickel filter media and are compatible with most high purity semiconductor process gases. These filters provide 9-log filtration of particles down to 0.0015 µm.
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NL - Tel. +31 70 413 07 50
USA - Tel. +(1) 973 383 0691
CN - Tel. +86 (10) 56865822/56865835
TW - Tel. +886-(0)3-5600560